Boron Trichloride for semiconductor

Gas Data FORMULA: BCl3 MOLECULAR WEIGHT: 117.17 SPECIFIC VOLUME: 0.21 m3/kg SPECIFIC VOLUME: 3.30 ft3/lb Shipping Data CAS NUMBER: 10294-34-5 DOT PROPER NAME: Boron Trichloride TC PROPER NAME: Boron Trichloride I.D. NUMBER: UN 1741 HAZARD CLASS: 2.3 (Poison Gas) HAZARD CLASS (Canada): 2.3 (8) Poison Gas LABEL: Poison Gas LABEL (Canada): Poison Gas, Corrosive Cylinder Specifications ULTRA-LINE® Cylinder Size Valve Outlet CGA No. Pressure psig @ 70F Pressure kPa @ 21.1C Approximate Ship Weights lb kg QF 660/634 4.4 30 202 91.6 UE 660/634 4.4 30 38 17.2 UK 660/634 4.4 30 33 15.0 Gas Grade Purity Specifications Gas Grade Purity Specifications Product Code Cylinder Size Content Equipment Recommendations Model No. US Metric Boron Trichloride Gigabit 5N Purity Guaranteed Specifications Nitrogen 4.0 ppmv Oxygen 1.0 ppmv Carbon Dioxide 2.0 ppmv Carbon Monoxide 0.5 ppmv Methane 0.5 ppmv Hydrogen Chloride 50.0 ppmv Phosgene 1.0 ppmv Chlorine 10.0 ppmv G2658401D G2658370D G2658402D G2658403D QF GA UE UK 70 lb 40 lb 10 lb 5 lb 31.73 kg 18.144 kg 4.54 kg 2.27   Metals Specification Aluminum 50 ppbw Calcium 10 ppbw Chromium 50 ppbw Copper 20 ppbw Iron 200 ppbw Potassium 50 ppbw Sodium 50 ppbw Nickel 50 ppbw Silicon 500 ppbw A lot analysis will be provided on request. Please inquire for specific cylinder analysis. Gas Grade Purity Specifications Product Code Cylinder Size Content Equipment Recommendations Model No. US Metric Boron Trichloride ULSI Plus 5N Purity Guaranteed Specifications Oxygen 1.0 ppmv Nitrogen 4.0 ppmv Methane 0.5 ppmv Carbon Monoxide 0.5 ppmv Carbon Dioxide 2.0 ppmv G1627223-9 G1627258-5 G1627261-9 QF UE UK 70 lb 10 lb 5 lb 31.73 kg 4.54 kg 2.27 Manual Control Personal Monitor Cross Purge 61A-660 IQ250 4774-660 Metals Specification Aluminum 50 ppbw Calcium 10 ppbw Chromium 50 ppbw Copper 20 ppbw Iron 200 ppbw Potassium 50 ppbw Sodium 50 ppbw Nickel 50 ppbw Silicon 500 ppbw Total Metals 1000 ppbw A lot analysis will be provided on request. Please inquire for specific cylinder analysis. Gas Grade Purity Specifications Product Code Cylinder Size Content Equipment Recommendations Model No. US Metric Boron Trichloride ULSI 5N Purity Guaranteed Specifications Oxygen 1.0 ppmv Nitrogen 4.0 ppmv Methane 0.5 ppmv Carbon Monoxide 0.5 ppmv Carbon Dioxide 2.0 ppmv G1627323-7 G1627358-3 G1627361-7 QF UE UK 70 lb 10 lb 5 lb 31.73 kg 4.54 kg 2.27 Manual Control Personal Monitor Tee Purge 61A-660 IQ250 4754-660 A lot analysis will be provided on request. Please inquire for specific cylinder analysis. Gas Grade Purity Specifications Product Code Cylinder Size Content Equipment Recommendations Model No. US Metric Boron Trichloride Semiconductor 4.5N Purity Guaranteed Specifications Oxygen 9.0 ppmv Nitrogen 30.0 ppmv Methane 1.0 ppmv Carbon Monoxide 3.0 ppmv Carbon Dioxide 5.0 ppmv G1627123-1 G1627157-7 G1627161-1 QF UE UK 70 lb 10 lb 5 lb 31.73 kg 4.54 kg 2.27 Manual Control Personal Monitor 61A-660 IQ250 A lot analysis will be provided on request. Please inquire for specific cylinder analysis.