|
| Description |
| NAME: |
BORON TRIFLUORIDE |
| SYNONYM: |
BORON FLUORIDE |
| FORMULA: |
BF3 |
| Gas
Data |
| MOLECULAR
WEIGHT: |
67.806 |
| DENSITY: |
2.867
kg/m3
@ 20ºC 101.325 kPa |
| DENSITY: |
0.1790
lb/ft3
@ 68ºF 14.696 psi |
| SPECIFIC
VOLUME: |
0.3488 m3/kg
@ 20ºC 101.325 kPa |
| SPECIFIC
VOLUME: |
5.5873 ft3/lb
@ 68ºF 14.696 psi |
| Safety
Information |
PERMISSIBLE
EXPOSURE LIMIT (TLV):
|
1 PPM |
| Shipping
Information |
| CAS
NUMBER: |
7637-07-2 |
| I.D.
NUMBER: |
UN 1008 |
| DOT
PROPER NAME: |
BORON
TRIFLUORIDE,COMPRESSED |
| TC
PROPER NAME: |
BORON
TRIFLUORIDE,COMPRESSED |
| HAZARD
CLASS: |
2.3 |
| LABEL: |
POISON GAS |
| Cylinder
Specifications |
| Cylinder
Size |
Valve
Outlet CGA No. |
Pressure
psig@70F |
Pressure
kPa@21.1C |
Approximate
Ship Weights |
| lbs |
kgs |
| 1A |
330 |
1,800 |
12,420 |
192 |
87 |
| 2 |
330 |
1,600 |
11,040 |
79 |
36 |
| 3 |
330 |
1,600 |
11,040 |
45 |
21 |
| 4 |
330 |
1,600 |
11,040 |
24 |
11 |
| LB |
180 |
1,600 |
11,040 |
6 |
3 |
| Gas
Grade Purity Specifications |
| Gas
Grade Purity Specifications |
Product
Code |
Cylinder
Size |
Content |
Equipment
Recommendations |
Model
No. |
| US |
Metric |
Boron
Trifluoride,
CP Grade
99.5 % |
1008091A
10080902
10080903
10080904
100809LB |
1A
2
3
4
LB |
60
lbs
15 lbs
6 lbs
2 lbs
0. 375lbs |
27.22
kg
6.81 kg
2.72 kg
0.91 kg
170 gm |
Single-Stage
Reg.
Cross Purge
Personal Monitor |
Series
B15-330
4775-330
IQ250 |
| A
certificate of conformance will be provided on request. |
| Gas
Data |
| FORMULA: |
BF3 |
| MOLECULAR
WEIGHT: |
76.81 |
| SPECIFIC
VOLUME: |
343.6
m3/kg |
| SPECIFIC
VOLUME: |
5.5
ft3/lb |
| Shipping
Data |
| CAS
NUMBER: |
7637-07-2 |
| DOT
PROPER NAME: |
Boron
Trifluoride |
| TC
PROPER NAME: |
Boron
Trifluoride |
| I.D.
NUMBER: |
UN
1008 |
| HAZARD
CLASS: |
2.3
(Poison Gas) |
| LABEL: |
Poison
Gas |
| Cylinder
Specifications |
ULTRA-LINE®
Cylinder Size |
Valve
Outlet CGA No. |
Pressure
psig @ 70F |
Pressure
kPa @ 21.1C |
Approximate
Ship Weights |
| lb |
kg |
|
4
|
330
|
1800
|
11040
|
24
|
11
|
|
7
|
330
|
1800
|
N/A
|
6
|
3
|
| Gas
Grade Purity Specifications |
| Gas
Grade Purity Specifications |
Product
Code |
Cylinder
Size |
Content |
Equipment
Recommendations |
Model
No. |
| US |
Metric |
Boron
Trifluoride
ULSI
4.0 Purity
Guaranteed Specifications
Air 10.0 ppmv
Sulfur Dioxide 20.0 ppmv
Silicon Tetrafluoride 50.0 ppmv |
G2658664
G2658665
|
4
7 |
0.99
lb
0.33 lb |
540
gm
170 gm |
|
|
| A
lot analysis will be provided on request. Please inquire
for specific cylinder analysis. |
See
Safe Delivery Source (SDS) for Ion Implant Gases |
|
|
