| Model
3610 Series High Purity Stainless Steel Regulator with Tied Diaphragm,
Single Stage |
| Description |
High purity regulators
designed for analytical applications using corrosive, toxic, or
pyrophoric gases.
 |
|
| Applications |
- Supply of corrosive,
toxic, or pyrophoric gases where a positive closure of the
regulator is desired
- Supply of
corrosive/toxic gases to semiconductor manufacturing
processes
|
| Design
Features/Components |
- High purity 316
stainless steel barstock bodies
- High purity 316
stainless steel diaphragms
- Metal to metal seals
minimize diffusion of contaminants
- 2" inlet and
delivery pressure gauges
- Bonnet ported and
threaded to pipe gases away from the work area
- Tied seat design
ensures regulator closure under most conditions
- Equipped with outlet
diaphragm valve
- ¼" compression
tube fitting on outlet
- Porous metal filter
protects seat from contamination
- Optional low
pressure relief port available
- Panel mountable
|
| Materials
of Construction |
| Gauges: |
316
stainless steel |
| Body: |
316
stainless steel |
| Bonnet: |
Nickel
plated brass |
| Diaphragm |
316
stainless steel |
| Seat: |
Kel-F
81® |
| Seals: |
Metal
to metal |
| Maximum
Inlet Pressure: |
3000
psig (24,200 kPa) |
Maximum
Flow Rate:
(At 2500 psig, N2): |
Model
3610: 550 SCFH (240 SLPM)
Model 3611: 135 SCFH (60 SLPM)
Model 3612: 195 SCFH (85 SLPM)
Model 3613: 195 SCFH (85 SLPM)
Model 3615: 550 SCFH (240 SLPM) |
| Flow
Capacity (Cv): |
0.06 |
| Operating
Temperature: |
-40ºF
to 165ºF (-40ºC to 74ºC) |
| Porting: |
1/4"
NPT female |
| Porting
Configuration: |
2
High, 2 Low |
| Optional
Porting: |
3
High, 3 Low (For relief valve) |
| Shipping
Weight: |
5 lbs |
| Ordering
Information |
| Model* |
Delivery
Pressure Range |
Delivery
Pressure Gauge |
Cylinder
Pressure Gauge |
| 3610-CGA |
4-100
psig |
30"vac-0-200
psig |
0-3000
psig |
| 3611-N/I |
2-30
psig |
30"vac-0-60
psig |
30"vac-0-300
psig |
| 3612-CGA |
2-30
psig |
30"vac-0-60
psig |
0-1000
psig |
| 3613-CGA |
2-30
psig |
30"vac-0-60
psig |
0-3000
psig |
| 3615-CGA |
4-100
psig |
30"vac-0-200
psig |
0-1000
psig |
| *Certain CGA
Limitations may apply |
| Options |
| Model |
Description |
| 4754-CGA |
Tee
Purge Assembly |
| 4774-CGA |
Cross
Purge Assembly |
| OPN-0301-SA |
Swagelok®
1/4" Tube Fitting |
| ADP-0047-BK |
Bonnet
Venting Fitting |
| KIT-0204-SA |
Bonnet
Panel Mounting Kit |
| ADP-0016-BA |
Bonnet
Vent Adapter to 1/8" NPT |
| MSP-0012-XX |
Inboard
Helium Leak Rate Certification |
| MSP-0013-XX |
Combination
Inboard/Outboard Helium Leak Rate Certification |
|
|
