| Model
9300 and 9310 Series ULTRA-LINE Ultra High Purity Regulators, Single
Stage |
| Description |
Ultra high purity
stainless steel regulators for use with semiconductor
applications.
 |
|
| Applications |
| All
semiconductor industry gas applications, such as dispensing of
forming gases, blanketing procedures, or etching operations |
| Design
Features/Components |
- Available in two
choices of materials: 316L stainless steel with 316
stainless steel internals (Model 9300 Series), or 316L
stainless steel with Hastelloy C-22® internals (Model 9310
Series).
- 2" inlet and
delivery gauges
- Autogenously butt-welded connections
- Only one
non-metallic seal in the process stream
- Standard 10-15 rms
surface finish
- Sealed and ventable
bonnet
- Helium leak tested
to 1 x 10-9 scc/sec
- Assembled, tested
and packaged in a class 100 clean area
- Body screw thread
tapped for back mounting
|
| Materials
of Construction |
| . |
Model
9300 Series |
Model
9310 Series |
| Gauges: |
316L
SS |
316L
SS |
| Body: |
316L
SS |
316L
SS |
| Bonnet: |
Nickel
plated brass |
Nickel
plated brass |
| Diaphragm: |
316
SS |
Hastelloy
C-22® |
| Seat: |
Kel-F
81® |
Kel-F
81® |
| Linkage: |
316
SS |
Hastelloy
C-22® |
| Spring: |
316
SS |
Hastelloy
C-22® |
| Seals: |
Metal
to metal |
Metal
to metal |
| Maximum
Inlet Pressure: |
3000
psig |
Maximum
Flow Rate:
(At 3000 psig Inlet, N2) |
480
SLPM (17 SCFM) |
| Flow
Capacity (Cv): |
0.09 |
| Operating
Temperature: |
-40ºF
to 160ºF (-40ºC to 71ºC) |
| Body
Porting: |
1/4"
VCR® compatible |
| Porting
Configuration: |
2
High, 2 How |
| Shipping
Weight: |
5
lbs |
| Ordering
Information |
| All of the
Model 9300 and 9310 Series are shipped double bagged under
purified Argon. All gauges used are 100% Helium leak tested and
have female 1/4" VCR® connections. |
| Model |
Delivery
Pressure Range (psig) |
Delivery
Pressure Gauge (vac-psig) |
Inlet
Pressure Gauge (psig) |
| 316L
Stainless Steel |
| 9303-4-V4FM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9303-4-V4MM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9307-4-V4FM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 9307-4-V4MM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 316L
Stainless Steel with Hastelloy C-22® Internal Parts |
| 9313-4-V4FM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9313-4-V4MM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9317-4-V4FM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 9317-4-V4MM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
Inlet/Outlet:
F = Female M = Male |
|
|
