| Model
9330 Series ULTRA-LINE Ultra High Purity Line Regulator with Tied
Diaphragm |
|
Description
|
Ultra high purity line
regulators with a tied seat design, for use with corrosive,
toxic, or pyrophoric gases
 |
|
| Applications |
| Point of use regulation
of gases used in semiconductor manufacturing, such as etchant or
dopant gases |
| Design
Features/Components |
- Tied seat design
ensures regulator closure under extreme circumstances
- 2" delivery
pressure gauge
- Autogenously butt-welded connections
- Only one
non-metallic component in the process stream
- Standard 10-15 rms
surface finish
- Sealed and ventable
bonnet
- Helium leak tested
to 1 x 10-9 scc/sec
- Assembled, tested
and packaged in a Class 100 clean area
- Body screw thread
tapped for back mounting
|
| Materials
of Construction |
| Gauge: |
316
stainless steel |
| Body: |
316L
stainless steel |
| Bonnet: |
Nickel
plated brass |
| Diaphragm: |
316
stainless steel |
| Seat: |
Kel-F
81® |
| Linkage: |
316
stainless steel |
| Spring: |
316
stainless steel |
| Seals: |
Metal
to metal |
| Maximum
Inlet Pressure: |
300
psig |
Maximum
Flow Rate:
(At 300 psig Inlet, N2) |
400
SLPM (14 SCFM) |
| Flow
Coefficient (Cv): |
0.36 |
| Operating
Temperature: |
-40ºF
to 160ºF (-40ºC to 71ºC) |
| Porting
Configuration: |
1
High, 2 Low |
| Body
Porting: |
1/4"
VCR® compatible
3/8" VCR® compatible |
| Shipping
Weight: |
5
lbs |
| Ordering
Information |
| All of the
Model 9330 Series are shipped double bagged under purified
Argon. All Gauges used are 100% Helium leak tested and have
female 1/4" VCR® connections. For a complete listing of
stocked assemblies, please request Matheson Publication BR-15
from your area representative or branch. |
| Model |
Delivery
Pressure Range (psig) |
Delivery
Pressure Gauge (vac-psig) |
| 316L
Stainless Steel |
| 9332-3-V4FM |
0-30
psig |
30"-0-60
psig |
| 9332-3-V4MM |
0-30
psig |
30"-0-60
psig |
| 9332-3-V4FF |
0-30
psig |
30"-0-60
psig |
| 9332-3-V6FM |
0-30
psig |
30"-0-60
psig |
| 9332-3-V6MM |
0-30
psig |
30"-0-60
psig |
| 9332-3-V6FF |
0-30
psig |
30"-0-60
psig |
| 9333-3-V4FM |
0-100
psig |
30"-0-200
psig |
| 9333-3-V4MM |
0-100
psig |
30"-0-200
psig |
| 9333-3-V4FF |
0-100
psig |
30"-0-200
psig |
| 9333-3-V6FM |
0-100
psig |
30"-0-200
psig |
| 9333-3-V6MM |
0-100
psig |
30"-0-200
psig |
| 9333-3-V6FF |
0-100
psig |
30"-0-200
psig |
Outlet
F=Female
Inlet M=Male
4=1/4 VCR compatible
6=3/8 VCR compatible
|
|
|
