| Model
9360 and 9370 Series ULTRA-LINE Ultra High Purity Regulators with Tied
Diaphragm, Single Stage |
| Description |
Ultra high purity
stainless steel regulators with a tied seat design, for use with
corrosive, toxic, or pyrophoric gases
 |
|
| Applications |
| All semiconductor
industry gas applications, such as dispensing of dopant or
etchant gases, or handling hazardous gases. |
| Design
Features/Components |
- Available in two
choices of materials: 316L Stainless Steel with 316
Stainless Steel internals (Model 9360 Series), or 316L
Stainless Steel with Hastelloy C-22® internals (Model 9370
Series).
- Tied seat design
ensures regulator closure under extreme circumstances
- 2" inlet and
delivery gauges
- Autogenously butt-welded connections
- Only one
non-metallic seal in the process stream
- Standard 10-15 rms
surface finish
- Sealed and ventable
bonnet
- Helium leak tested
to 1 x 10-9 scc/sec
- Assembled, tested
and packaged in a class 100 clean area
- Body screw thread
tapped for back mounting
|
| Materials
of Construction |
| |
Model
9360 Series |
Model
9370 Series |
| Gauges: |
316L
SS |
316L
SS |
| Body: |
316L
SS |
316L
SS |
| Bonnet: |
Nickel
plated brass |
Nickel
plated brass |
| Diaphragm: |
316
SS |
Hastelloy
C-22® |
| Seat: |
Kel-F
81® |
Kel-F
81® |
| Linkage: |
316
SS |
Hastelloy
C-22® |
| Spring: |
316
SS |
Hastelloy
C-22® |
| Seals: |
Metal
to metal |
Metal
to metal |
| Maximum
Inlet Pressure: |
3000
psig |
Maximum
Flow Rate:
(At 3000 psig Inlet, N2) |
480
SLPM (17 SCFM) |
| Flow
Capacity (Cv): |
0.09 |
| Operating
Temperature: |
-40ºF
to 160ºF (-40ºC to 71ºC) |
| Body
Porting: |
1/4"
VCR® compatible |
| Porting
Configuration: |
2
High, 2 Low |
| Shipping
Weight: |
5
lbs |
| Ordering
Information |
All
of the Model 9360 and Model 9370 Series are shipped double
bagged under purified Argon. All gauges used are 100% Helium
leak tested and have female 1/4" VCR® type connections.
|
| Model |
Delivery
Pressure Range (psig) |
Delivery
Pressure Gauge (vac-psig) |
Inlet
Pressure Gauge (psig) |
| 316L
Stainless Steel |
| 9363-4-V4FM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9363-4-V4MM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9367-4-V4FM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 9367-4-V4MM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 316L
Stainless Steel with Hastelloy C-22® Internal Parts |
| 9373-4-V4FM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9373-4-V4MM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9377-4-V4FM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 9377-4-V4MM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
Inlet/Outlet:
F=Female
M=Male |
|
|
