| Model
9460 and 9470 Series ULTRA-LINE Ultra High Purity Regulators with Tied
Diaphragms, Dual Stage |
| Description |
| Ultra high
purity stainless steel regulators for use with semiconductor
applications. |
|
| Applications |
| All semiconductor
industry applications requiring precise pressure control. |
| Design
Features/Components |
- Available in two
choices of materials: 316L stainless steel with 316
stainless steel internals (Model 9460 Series), or 316L
stainless steel with Hastelloy C-22® internals (Model 9470
Series).
- Dual tied seat
design ensures regulator closure under extreme circumstances
- 2" inlet and
delivery gauges
- Autogenously butt-welded connections
- The seats are the
only non-metallic components in the process stream
- Standard 10-15 rms
surface finish
- Sealed and ventable
bonnets
- Helium leak tested
to 1 x 10-9 scc/sec
- Assembled, tested
and packaged in a Class 100 clean area
|
| Materials
of Construction |
| . |
Model
9460 Series |
Model
9470 Series |
| Gauges: |
316L
SS |
316L
SS |
| Body: |
316L
SS |
316L
SS |
| Bonnets: |
Nickel
plated brass |
Nickel
plated brass |
| Diaphragms: |
316
SS |
Hastelloy
C-22® |
| Seats: |
Kel-F
81® |
Kel-F
81® |
| Linkages: |
316
SS |
Hastelloy
C-22® |
| Springs: |
316
SS |
Hastelloy
C-22® |
| Seals: |
Metal
to metal |
Metal
to metal |
| Maximum
Inlet Pressure: |
3000
psig |
Maximum
Flow Rate:
(At 3000 psig Inlet, N2) |
480
SLPM (17 SCFM) |
| Flow
Capacity (Cv): |
0.05 |
| Operating
Temperature: |
-40ºF
to 160ºF (-40ºC to 71ºC) |
| Porting: |
1/4"
VCR® compatible |
| Shipping
Weight: |
5
lbs |
| Ordering
Information |
| All
of the Model 9460 and 9470 Series are shipped double bagged
under purified Argon. All gauges used are 100% Helium leak
tested and have a female 1/4" VCR® compatible connection. |
| Model |
Delivery
Pressure Range (psig) |
Delivery
Pressure Gauge (vac-psig) |
Inlet
Pressure Gauge (psig) |
| 316L
Stainless Steel |
| 9463-4-V4FM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9463-4-V4MM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9467-4-V4FM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 9467-4-V4MM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 316L
Stainless Steel with Hastelloy C-22® Internal Parts |
| 9473-4-V4FM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9473-4-V4MM |
0-30
psig |
30"-0-60
psig |
0-3000
psig |
| 9477-4-V4FM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
| 9477-4-V4MM |
0-100
psig |
30"-0-200
psig |
0-3000
psig |
|
|
